A corrosion resistant component of semiconductor processing equipment such as a plasma chamber comprises zirconia toughened ceramic material as an outermost surface of the component. The invention also relates to pharmaceutical compositions containing the succinate and malonate complexes of formula I. To create the abbreviated index, indicators for overlapping parameter patterns of a given parameter pattern are placed in the index. Adjusting a data rate for a message sent from one or more terminals through the return link in the presence of signal degradation or power loss does not appreciably change the interference relationship among the plurality of terminals. The double-sided waveguide biosensor detects the properties of the sample solution via a variation of a light beam intensity of the outgoing light beam. Phosphor particles are arranged in a densely packed layer within the coating at the light emitting surface, and such that the light emitting surface is in contacting relationship with the phosphor particles.