A chemical liquid supply device has a pump provided with a pump chamber which is expanded and contracted by an elastically deformable bellows, and chemical liquid in a chemical liquid container flows into the pump chamber through a suction channel. The transistor using a single crystal silicon nanowire comprises a substrate and a single crystal silicon nanowire formed on the substrate. The data inputoutput circuit includes a main amplifier that amplifies data written into selected memory cells in the memory cell array during data write operation and that amplifies data read from the selected memory cells during read operation, and a memory element provided accompanying the main amplifier in order to repair a defective memory cell in the memory cell array. Subsequently, the convolution method is used to process the sampling signals for producing system transfer functions. The second roughened surface is formed to have a surface roughness equivalent to or less than that of the first roughened surface.