Provided is a polymer film containing at least one of a compound represented by formula of hydrates, solvates, or salts thereof. In particular, a set of metrology data measured or simulated for one or more substrates treated using the treatment system is obtained. A semiconductor device in which an oxide semiconductor film having low resistance is formed and the resistance of a channel region of the oxide semiconductor film is increased. In the first connection state, the aerosol introduction port and the aerosol lead-out port are communicated with each other. The second transistor is coupled to control the first transistor and the voltage-clipping device in response to a control signal.