A vectorizable execution unit is capable of being operated in a plurality of modes, with the processing lanes in the vectorizable execution unit grouped into different combinations of logical execution units in different modes. The method comprises providing a substrate comprising at least one layer of a porous dielectric material comprising a contaminant comprising at least one entrapped liquid having a surface tension, wherein the porous dielectric material comprising the at least one contaminant has a first dielectric constant. DC discharge is then re-generated by applying, to the electrostatic electrode plate, DC voltage having the same potential as a second predetermined potential which is generated at the wafer after the DC discharge is generated, and by increasing the absolute value of the potential difference between the wafer and the chamber. A data storage device capable of storing the database of manufacturing data, including semiconductor characteristic data and manufacturing conditions is networked to the at least one input device. Cutout recesses are formed in the wooden member, and the screw members are threaded into the wooden member through the recesses and the steel rod is locked to the screw members.