A data processing system allows processes to be checkpointed and restarted. The data integration apparatus receives sensing information from at least one sensing device, the sensing information including a value indicating the existence of signals and confidence estimated parameters indicating the degree of confidence for the value indicating the existence of signals, and then generates the weighting factor based on the confidence estimated parameters. On the other hand, in consideration of a current value and irradiation energy of a charged particle beam, an electric field on the surface of the inspection wafer, emission efficiency of the secondary electrons and back scattered electrons, and the like, an electric resistance and an electric capacitance are determined so as to coincide with those in the inspection image. The user may interact with the system to modify the selected executable instructions, command code sets, and command keycommand code mappings. The molding equipment and related processes are particularly useful when forming the various layers by reaction injection molding.