1459909328-3efec69e-b2bb-465c-9107-a96959d04eb8

A substrate processing apparatus includes: a chamber including a body having an open portion and a door for blocking the open portion; a substrate supporter connected to the door; and a door operating means including a rotation shaft for straightly moving and rotating the door, the door and the body separated in parallel from each other by straightly moving the door. The power supply may be configured to supply power to the oscillator as a function of the amplitude or frequency of the oscillating signal to improve power efficiency. A flow of a medium is provided in at least one region adjacent to the jacket surface, which is directed from the longitudinal mid-axis of the application roller to the outside. In some implementations, the organ systems are fluidically connected with a constant-volume pump. The docking station may be disconnected from an AC outlet so that the docked cellular telephone retains both enhanced display capabilities, which prove to be highly desirable for applications such as Internet access, as well as its inherent portability. Brake pressure difference signals are generated to indicate the difference between brake pressure and a commanded brake pressure, and an adjusted brake pressure error signal is generated in response to the brake pressure difference signals.