A method of decomposing a target pattern having features to be imaged on a substrate so as to allow said features to be imaged in a multi-exposure process. The pre-strained and strain-free fiber Bragg grating sensors each comprise a Bragg grating inscribed in a fiber. Interconnects coupling bonding pads of the die to the substrate may pass through the chamber and through vias in the wick layer. It can also be a fixed pricing mechanism for the sale, rental, or subscription of the product. A plurality of fan blades are coupled to the split drive ring. The entity ranking module may be configured to organize ranked entity data into placemark layers.