An integrated camera module for capturing video images in very small digital cameras, cell phones, personal digital assistants, and the like. It consists of two steps: the step of dry etching an aluminum interconnect stack by using an etch gas composed mainly of boron trichloridechlorinefluoroformnitrogen, and the step of removing etch remnants by using a vapor plasma. The grommet 10 includes: a supporting hole 12 into which the pin member 20 is inserted from the surface side the back side; and an engaging portion 15 for preventing the pin member 20 from coming out from the supporting hole 12. In other words, a current in the set operation can be large.