Disclosed are a homography estimation apparatus and method. The first layer may comprise substantially single-crystal silicon. In the pipe latch control circuit, the read command control unit selects, in response to the control signal, the first signal or selects a second signal obtained by delaying the first signal according to an internal clock, and generates the selected first or second signal as the read signal. The deflection of the MEMS differential actuated nano probe can be also achieved in piezoelectric or electrostatic way. The noise detection techniques include two-clean-frequency noise detection, one-clean-frequency noise rejection, and combined two-clean-frequencyone-clean-frequency noise detection.