In a method for determining speech quality using an objective measure, in order to enhance prediction reliability of the evaluated quality parameters, distortions of the mean spectral envelope are extensively corrected with a weighting function WT before comparing spectral properties. Embodiments include inspecting a wafer using an inspection tool, such as a CCD imager, generating a list of the tools visited by the wafer from data retrieved from a conventional manufacturing execution system and displaying the list at the inspection tool, along with a defect map. The display device substrate includes an organic insulating film and an inorganic insulating film, and the inorganic insulating film is stacked directly on and above the organic insulating film such that an organic-inorganic film stacked body is formed. A top member is supported on and connected with the table frame and the top support members, defining a plurality of workstations.