A plant for the manufacture of tablets, comprising a rotary tabletting machine, a control cabinet which houses a machine computer, a control desk which preferably is mobile and houses a service computer to operate functions of the tabletting machine and store data including an emergency stop, a printer connected to the control desk, and peripheral devices such as a tablet tester, dust trap, etc. In particular, a method includes a two-step oxide process in which an oxide liner lines the inside surface of a trench and the trench is filled with a bulk oxide layer, preferably using a high density plasma chemical vapor deposition process. A groove which extends in a longitudinal direction of the light guiding member is formed between the first and second light direction changing faces. A gyro sensor is connected to the control unit, wherein the control unit is devised to present the marked area portion as a bottom portion of the indicator area with a gyro-controlled upper border of the area portion which is maintained substantially horizontal. Reversible bonding of articles and controlled parting of an adhesive bond between articles can be achieved with the adhesive system. The passivation layer is used to prevent deterioration of the dielectric characteristic of the low k dielectric layer during the stripping process.