A method of manufacturing a semiconductor substrate and semiconductor device is disclosed and comprises forming a first monocrystalline semiconductor layer on a semiconductor base material, forming a second monocrystalline semiconductor layer covering the first monocrystalline semiconductor layer, and forming a support hole exposing the semiconductor base. A force feedback device, coupled to a host computer, includes an actuator for outputting forces on a manipulandum and a sensor for detecting a position of the manipulandum. A user interface for displaying the digital document on a display device based on the data related to the display form is still further included. An image formed by a display device including the display units is kind to the eye in the same way as printed matter, and does not cause eyestrain due to flickering of emitted light. Facing opening 112 is conductor element 121, which is larger than said opening, and facing opening 152 is conductor element 141, which is larger than said opening. For detection of the multiphase flow, an additional, second indicator quantity that is independent of the first indicator quantity is used.