A radio communication system, a radio communication apparatus, and a radio communication method allow networks to operate without interference between contending networks. The reticle can be associated with EUV lithographic tools. The drive shafts of the motors have splined ends that engage each other within a central cavity. The curved area of the outer surface has a radius of curvature smaller than the wall thickness of the metal tube. Accordingly, the electric field becomes uniform by the electric field adjusting grooves provided on the surfaces of the outer ends of the vanes, so that generation of undesirable harmonics is suppressed. An apparatus comprising a blasting pot and a compressor to generate the spray mixture and propel it from a nozzle is also disclosed.