Compounds are provided that act as potent antagonists of the CCR1 receptor, and have in vivo anti-inflammatory activity. The via is formed in the first polycrystalline silicon layer to expose the substrate and a second polycrystalline silicon layer is formed in the via to contact the substrate. The flow properties associated with the sediment body include flow velocity, suspended sediment volume fractions, deposition time, and flow height. The gate is formed adjacent the well between the source and drain, and the source is configured to receive a bias voltage from a power amplifier. The arbitration unit determines a memory circuit to be accessed for each request that is received from a requester. The chamber volume of the microwave apparatus can be changed by moving a flexible portion of a flexible wall while a perimeter portion of the flexible wall remains fixed.