Among a plurality of first inner electrodes, at least one first inner and a second inner electrode are arranged as opposed with at least one of the dielectric layers in between. The aluminum nitride material has an aluminum nitride main component and includes at least 0. An air tight chamber is formed within the inner cavity of the feeding device adjacent the upper end of the hollow body. The protocol data may include a rule and one or more health attribute values. The inquiry module inquires the CAD drawings of each checked workpiece and acquires relational parameters of the checked workpieces from the CAD drawings. When the set in the store forwarding buffer is full, an older entry in the set is discarded in favor of the newly allocated entry.