A probe card includes a flexible membrane, a plurality of probes attached to the flexible membrane, and a layer of foam connected to the flexible membrane so that when the probes are moved into the flexible membrane, the layer of foam is also deflected to produce a counteracting force at the probes. Methods include ablating an article with the ablation beam to form a test location having an ablation depth, transmitting a first beam through the test location of the article, transmitting a second beam through a reference location, and determining an ablation beam characteristic based on a phase relationship of the first beam and the second beam downstream of the article. The anti-reflective coating includes an anti-reflective layer of silicon oxime, silicon oxynitride, or silicon nitride, and a barrier layer which is grown on the anti-reflective layer using a nitrous oxide plasma discharge to convert a surface portion of the anti-reflective layer into silicon dioxide. Some embodiments of the exercise device include a lockout device that selectively eliminates the variable stride features of the exercise device and allows the user to exercise in a stepping motion. A gear engaged with the inner gear on the wind blade rotating cage is mounted on a generator shaft extending outside the generator cabin.