1459916540-00d81aad-9ef1-455e-9206-632c35853914

A method for measuring an angularly resolved intensity distribution in a reticle plane of a projection exposure apparatus. A feedback control system is created between transmitting and receiving units, wherein the receiving unit provides positional data about the light beam from the transmitting unit. The resolution of the scalable display is the combined resolutions of the smaller displays according to the vertical and horizontal layout of the smaller displays.