A thin-film inspection apparatus calculates a film thickness of a first transparent thin film and a second transparent thin film of an inspection-target substrate including the first and second transparent thin films and a transparent conductive film on a transparent glass substrate. The co-branded Internet site is accessible through the Internet service site of the Internet service provider. A light guide receives the light from an edge surface and guides the light by total internal reflection. The invention also solves problems like low rigidity and large accumulation errors of existing serial scanning mechanisms and the effect of the electromagnetic field of the motor within the ion implant chamber on the trajectory of the ion beam. When data is received from the external apparatus in the second power state, if the received data matches the prohibition condition, the interface unit does not transmit a return command to the power control unit, and if the received data does not match the prohibition condition, the interface unit transmits the return command to the power control unit. After detecting a first feature having at least one end thereof to be in the proximity of one end of a second feature, a first OPC pattern is incorporated to the end of the first feature toward a first direction; and a second OPC pattern is incorporated to the end of the second feature toward a second direction that is substantially opposite from the first direction.