For aggressively scaled field effect transistors, nitrogen is incorporated into a base oxide layer, wherein, at an initial phase of a plasma nitridation process, the nitrogen ion density is maintained at a value so that incorporation of nitrogen into the channel region is minimized. Powered by this technology, a user is able to complete many complicated control tasks via guided control of objects without utilizing laser pointers, IR transmitters, mini-projectors, or bar code tagging andor customized wall paper are not needed for the environment control. In the second step, the virtual machine monitor saves a suspension count and disables the hardware event counter upon suspending operation of the virtual machine. The control logic receives data from the first bus and transfers the data to the second bus. A temperature of the substrate during such depositing is greater than 450\xb0 C.