A suspension board with circuit includes a circuit board and an optical waveguide provided in the circuit board. The first grid passes X-rays emitted from an X-ray source and produces a first periodic pattern image. The transverse rail is connected to the upper rail and the lower rail and disposed outwardly of the upper rail and the lower rail. The argon containing plasma process may form a first layer on the fin structure and STI structure and an ammonia fluoride containing plasma process may form a second layer on the first layer.