A microscopic-measurement apparatus capable of conducting measurement successively in several set areas regardless of the type of stage driving system or the precision of the stage driving system. The rack includes a base and two spaced posts perpendicularly extending up from the base. The present invention provides novel aluminum phosphinimine complexes, containing additional heteroatoms which are useful in the polymerization of olefins. The method forms a conformal dielectric layer overlying the gate structures. 0 \u03bcm or less, as the inorganic fine powder in an amount of from 0.