The hybrid drive device wherein: a case space is divided by a partition wall into a first case part and a second case part; a drive electric motor is provided in the first case part; a friction engagement element is provided in the second case part; and a through hole that communicates the case spaces is formed. The invention provides for the direct measurement of air density fluctuations, thus allowing for correction of measurement errors, including those due to air turbulence and air thermal variations in a measurement path of a distance measuring interferometer. The marking may be formed as apertures through or recesses in one or more stereolithographically fabricated layers of material, or the marking may include one or more stereolithographically fabricated layers that protrude from a surface of a semiconductor device component. Each set of TEP includes a P-type and an N-type thermoelectric thin film elements electrically connected to each other.