An image reading and recording apparatus has a scanner unit for effecting exposure conforming to an image signal on a photosensitive drum, a heat roller pair for fixing a toner image formed on a recording sheet, and a reading unit for reading an original. An object of the present invention is to provide a flow path control valve, which can rapidly and accurately control a flow path for a working fluid and also prevent a back flow of a working fluid without an additional check valve, thereby reducing the size of the product. A second method verifies proper de-clamping of a semiconductor wafer from a support member before the semiconductor wafer is removed from the support member upon completion of a semiconductor process. A conduit box having a bottom wall with a lead opening is positioned on the electric motor with the gasket between the conduit box and the electric motor, the conduit box lead opening aligned with the gasket lead opening and the motor leads passing through the conduit box lead opening. A second interlayer insulating film is formed to fill in the depressed portion, cover the upper surface of the insulating barrier film, and have a second interconnection buried therein. When torque is distributed in an electric mode of operation with the engine disabled, the generator is disabled based at least upon a difference between actual generator speed and an expected generator speed exceeding a threshold, indicating a lockup in the planetary gear set.