A DNA detection device and a manufacturing method thereof detects DNA by an electrical method without a separate process for detection by using semiconductor microfabrication techniques. Furthermore, three-dimensional multiprocessor systems are provided having multi-dimensional cache memory architectures with access wiring structures that enable different access patterns in multiple dimensions. The container includes a lower open end permitting the coolant to drain from the container. Also, sidewall films each composed of a laminated film of the silicon oxide film and the polycrystalline silicon film are formed on the sidewall of the gate electrodes in the logic circuit area, and these films are used as a mask to form semiconductor areas. A number K0 of cycles of the stepping motor per revolution of the exposure drum for a specific printing result is determined once.