A pattern formation material of this invention contains a base polymer including a unit represented by Chemical Formula 1 and, and an acid generator:Chemical Formula 1:wherein R1 is a hydrogen atom, a chlorine atom, a fluorine atom, an alkyl group or an alkyl group including a fluorine atom; and R2 is a protecting group released by an acid. The extraction is carried out using carbon dioxide at supercritical conditions, with or without the addition of a modifier. A voltage to current converter converts the voltage at the single ended output to an output current that is applied to an input branch of a current mirror. Each application of the processing system generates an event message at a predetermined stage and sends the event message to the tracking system. This is followed by the electrical isolation of the defective net from the electrical repair structure and passivation of the electrical repair line.