A system for impedance matched switching of an input signal from an input source includes a first switch, such as an FET, for controllably switching the input signal from an input terminal connected to the input source to an output terminal, the switching being controlled according to a control voltage. The mask pattern is associated with a mask capable of transmitting at least a portion of the variably polarized light through the mask pattern. During the thermal reaction, the metal alloys from the both the diffusion barrier and the Cu alloys seed layer react forming a metal alloy reaction product between the diffusion barrier and the Cu seed layer.