Various embodiments of a respiratory interface device, such as a mask, that includes a first substantially rigid portion, a second substantially rigid portion and a connecting member that is structured to flexibly connect the first and second substantially rigid portions. It exhibits compact, uniform growth and flowering under greenhouse conditions when grown as a potted floral plant. As a result, the overall center-of-gravity and weight of the actuator assembly is significantly reduced, as is the overall size envelope. Preferably, the SiC layer is formed in a reaction chamber having a flow of substantially pure trimetholsilane streamed into and through the reaction chamber under a pressure of less than about 2 torr therein.