A reliability extracting section extracts the reliability of positioning at a person’s position calculator on the basis of an image captured from an imaging section. The storage buffer also includes a shift FIFO that is coupled to the plurality of storage locations. The processor outputs a first command signal to the speaker relating to a first actuation device, then outputs a second command signal to the speaker when the first actuation device is actuated, with the second command signal relating to a second actuation device. The method also includes steps of etching the target material layer using the patterned hardmask feature as a mask feature, wherein one of the gases chemically alters the patterned hardmask feature and at least one of the gases chemically repairs the patterned hardmask feature so that the patterned hardmask feature retains its dimensions during the etching.