A heat exchange section is provided in the middle of a circulation water path connecting between a temperature-controlled water tank and a semiconductor manufacturing apparatus body so as to perform a heat exchange with air of a clean room. The client device includes means for establishing a communication between the client device and a third party entity associated with the rights management system based on a received item and associated usage right. The sensor is configured to close the valve when exposed to a predetermined amount of fluid. The alert distributor uses an efficient technique to group collaborating systems and then pass data between certain members of those groups according to a schedule. In both ends of the rolling member, clearances are respectively formed to permit the deformation produced by its abutment with the projecting portions 13 and 14.