Methods and systems for performing at least one of video encoding and video decoding are disclosed. Deposition precursor is emitted from individual gas inlets associated with individual of the wafers received within the chamber effective to form a respective monolayer onto said individual wafers received within the chamber. The method also involves adhering an adhesive tape to a front side of the semiconductor wafer and to at least a portion of the substrate carrier. 1 to 10 parts by weight of a corrosion prevention additive.