A xerogel aging system includes an aging chamber with inlets and outlet and flows a gel catalyst in gas phase over a xerogel precursor film on a semiconductor wafer. A plurality of first spools are rotatably attached to the first side of the deck plate. The chimney shaped receptacle also has a slot that receives a terminal blade that electrically connects the spring to the coil. The controller inhibits the reset unit from executing the initialization when an execution file which cooperates with an external device is executed or data are exchanged with the external device, even if the non-operation state of the operation screen continues for the predetermined period. The present invention also relates to a process for manufacturing said reservoir.