A lithographic projection apparatus includes a beam production system for projecting a patterned beam of radiation onto a target portion of a substrate, and a support table for supporting an article. The magnetoresistive element has a plurality of element-constituent layers that are stacked and include a free layer having a magnetization direction that changes in response to a magnetic field to be detected by the magnetic detector. Although output impedance is changed, damage to the power amplifier can be prevented. The thermistor detects a surface temperature of the heating roller.