Methods for processing substrate to deposit barrier layers of one or more material layers by atomic layer deposition are provided. The invention also provides a novel diagnostic method which can be used for detection of all types of influenza A and B virus. The data processing unit solves problems of conventional data processing units including separate central unit and peripheral power supplies in that an unexpected power down of the peripheral use power supply can cause malfunctions of the central unit because of, e. The inter-electrode spacing and electrode width are set so that each cavity has at least one pair of electrodes underneath it to excite a microplasma discharge in the cavity. The system further includes a means for controlling the dynamically controllable photonic material parameter. Also described is a method for treating bacterial infections by administering to a mammal a pharmaceutical composition containing a therapeutically-effective amount of a compound of the invention, and processes for the preparation of such compounds.