The present invention discloses the improvements to a vacuum swing adsorption process used for Xe recovery. The base material including the resonators can be used in printing press applications, finishing applications, packaging applications, distribution applications, and downstream applications. The deflecting electrode may serve as a getter pump to improve pumping efficiency and divert metal ions from the plasma flow. A first phase compensation capacitance has one end connected with a first connection node between the first constant current source and the first transistor and the other end connected with the output terminal. The sub-scheduler can use a matching scheme such as CRRD and CMSD.