An attenuating embedded phase shift photomask blank that produces a phase shift of the transmitted light is formed with an optically translucent film made of metal, silicon, nitrogen and oxygen. The disk drive unit is provided inside the electronic apparatus and has an insertion slot into which a disk medium is to be slid or placed. 05 to 2% Fe, balance of Al, and unavoidable impurities. The remaining sources on the list are checked in descending priority order until a driver matching the driver profile is found. The authentication server 200 transmits to the service providing apparatus 300 authentication information corresponding to the one-time ID to allow the user to log into a service providing apparatus 300. The recycling apparatus includes a compressor having an inlet connected to a spent protective atmosphere gas supply line, and a solvent supply configured to supply solvent to a gas passage at or upstream of the compressor.