A system for processing a substrate is described. This results in the silicon nitride being strongly bonded to the structure and in improved performance. A plurality of buss bars are received in corresponding trays. The intermediate and the processes described are very useful in the synthesis of pharmaceutical products. Andor the elastomeric element and the metallic element can be arranged and adapted to seal the chamber’s interface in series once the lid is in its sealed condition. Finally, the first and the second solder materials are allowed to cool down, so that the first solder material solidifies earlier than the second solder material.