A method for sealing and fabricating a cap in an FED is provided which is able to seal a cap in a vacuum space. The gas support system enables the charged particle beam device to provide sufficient gas for decharging the specimen with a total gas flow which is significantly lower than the total gas flow of charged particle beam devices using previously known gas supply systems. The target data set is transformed using a selected complex-valued, directional, multi-resolution transform satisfying the Hubert transform property at least approximately. The server accesses status information stored in the knowledge matrix relating to the identified process items and data items. The preferred electrode is a solid wire which may be in the form of a metal cored wire.