Feedstock delivery systems and hydrogen-producing fuel processing assemblies and fuel cell systems containing the same. The ashing method uses a two-step plasma process involving an hydrogen-containing gas, where low or zero bias is applied to the substrate in the first cleaning step to remove significant amount of photoresist remnants and etch residues from the substrate, in addition to etching and removing detrimental fluoro-carbon residues from the chamber surfaces. Responsive to a notification from a transmitter of a transmission in a predetermined transmission frequency band, at least one countermeasure is performed by at least one of the modules. The sub-circuit cells may include at least one reusable circuit cell. The FD SOI may be fabricated by forming a body with a thin silicon layer disposed on a buried oxide.