A source of X-rays including at least two cathodes and at least one common anode configured and arranged so as to generate at least two spaced apart beams of X-rays emanating from respectively different locations of the anode, and separately controlled so as to be generated independently of one another. A conventional dry etching gas, such as HI, is used to etch ITO using RF or plasma energy. Each of the two corresponding long side walls of the cartridge body is disposed with at least a latch unit. When a container is locked on for a move, the mobile unit starts reporting positions and velocities to the dispatcher workstation over a radio channel.