A process for forming the lower and upper electrodes of a high dielectric constant capacitor in a semiconductor device from an organoruthenium compound by chemical vapor deposition. The accessory modules provide conveniently located utility services and applications such as power, lighting or media connections, and may be interchanged within the bus system to provide particular services and applications where they are needed most. A gas supply opening 42, to which gas ejected from an inflator 22 is supplied, is disposed at a first inflation portion 38 side.