In a coating apparatus, a nozzle connects a feed pipe for feeding a coat solution to a manifold of a die with an opening of the manifold. The rear assembly is attached to the deck. The method further includes etching the layer of conductive material to form multiple spacers adjacent to the at least one control gate, where at least one of the spacers forms a floating gate in at least one memory cell. This connecting structure may keep a capacitance of a capacitor and improve contact reliability.