Metal-insulator-metal capacitor structures are formed in semiconductor substrates using an anodization procedure on deposited underlying metalization followed by deposition of the second metal and planarization by chemical-mechanical polishing or other procedures. The evacuating energy combined with the pressurized liquid produces a pressure gradient which serves to provide a continuous supply of cooled liquid cryogen for providing cooling to the superconducting cable. It is disclosed here that the implanting of fluorine increases the oxidation rate of the polysilicon and because of the faster oxidation, the polygate bird’s beak that is formed attains a relatively short and sharp in comparison with conventional beaks. The quantity and location of liquid propellant in the tank is determined by evaluating the light signals emitted by the glass fibers.