Semiconductor devices and methods of making thereof are provided. The buried part of the gate region is formed from a cavity under the channel region. In one example the cooling fluid comprises seawater. Each of the titles contains an application management table indicates an application that has a life cycle bound to the title. The artificial Th epitopes are covalently linked to the target antigenic site and and optionally an immunostimulatory sequence to provide effective and safe peptide immunogens.