1459953006-42600a63-c9f3-428c-b2ad-54c26a49835a

The electrostatic chuck includes a base including an aluminum nitride-containing member; a dielectric layer formed on the base including a member having a volume resistivity of at least 1\xd71015 \u03a9\xb7cm at a temperature range of about 25\xb0 C. The shorting terminal includes a contact piece formed by bending and pushed at the time of insertion into the housing and a support formed by bending and held in contact with the contact piece from a side opposite to a push-in direction into the housing. Another embodiment of a drive socket includes a first set of three lobes and a second set of three lobes, each lobe being of equal radius and equidistant from the center of the fastener. A brush head is attached vertically to the bottom of the cleaning head by a series of split snaps. In some example embodiments, a light source is employed that comprises a solid-state light source, e. The device allows illumination effects similar to those of natural outdoor environments to be reproduced in indoor environments.