An inverter has a measuring part that measures an operating time such as the time interval from when a command to start a specified operation by an associated system until a signal indicating the completion of the operation is received. The disclosure describes ways to deliver moieties to a target tissue, where the target tissue in general is not at the point of introduction, in such a way that minimal damage is produced in the tissue at the point of introduction. Also disclosed are a method and apparatus for attaching a pad to a trampoline frame either with or without an enclosure. A second removal is subsequently performed to remove remnant silicon nitride hard mask with a second phosphoric acid solution.