1459957165-d32e3604-790d-4aff-99ad-1d6fb36f0cc1

A plasma assisted cryogenic cleaner for and a method of performing cleaning of a surface that must be substantially free of contaminants has a resiliently mounted nozzle for spraying a cryogenic cleaning medium on the surface. 1 to 3 molar equivalents of hydrogen relative to the unsaturated fluorine-containing halogen compound in a vapor phase in the presence of a supported palladium catalyst in which an amount of supported palladium is 0. According to the invention, the drive member is arranged to execute a reciprocating motion. If so, the record of contact routing rules associated with the user is accessed.