The present invention generally relates to semiconductor processing, and in particular to methods and systems for analyzing photolithographic reticle defects that include detecting soft defects on a reticle and analyzing the material composition of the defects for a particular chemical signature. The window frame includes a first frame having a first side, a second side, an outer perimeter edge, and an inner perimeter edge. The rotor extends along and is rotatable about the longitudinal axis within the rotor receipt cavity. Consequently, the probability of properly recovering the specific substream is greatly increased. The harder layer supports the electrolyte membrane or the electrode.