An iodine-doped ruthenium barrier layer for use with copper interconnects within integrated circuits is formed using novel, iodine-containing ruthenium precursors in an ALD or CVD process. The battery unit further includes a terminal member inserted into the case through the terminal insertion portion from an exterior of the case and coupled to the electrode assembly, the terminal member having a terminal portion, extending in a major side direction of the cap plate at an exterior of the cap plate, and being separated from an upper surface of the cap plate. A DLL clock multiplexer includes a series of shift registers, each of which selects only one of the many input clock signals at each stage. The second packing extends on an outer circumferential surface of the other connector to provide waterproof interface between an inner circumferential surface of the other case’s mounting hole and the other connector’s outer circumferential surface. Furthermore, method and apparatus for preventing destruction of the film due to a pressure difference by detecting damage to the film during inspection are offered. The antifrictional layer includes fat, oil, surfactants andor wax.