A system for cleaning grates includes a first power wash portion for applying a pressurized wash fluid to a first side of a grate, and a second power wash portion for applying a further pressurized wash fluid to a second side of the grate. During formation of a multi-layered resist, a hard mask material is introduced beneath an anti-reflective coating to be used as an etch stop layer. An issue certificate having a parent-card digital signature is stored in the child card, the issue certificate contains a service code and a child-card identification, and thus it becomes possible to confirm a service set in the child card based on the issue certificate as the parent-card signature data. The rigid and flexible sections provide an integral device capable of achieving motion by elastic deformation. The polygon changes shape as the various potentiometers are adjusted. The support frame includes side supports having a sliding surface of different widths to retain and release the forward and rear tabs of the shelf.