An orchestrator executes an end-to-end process across applications. And after the wafer is developed, an image of each of the plurality of part areas on the wafer developed is picked up, and matching with a template is performed on the image datum of each part area. Then, a chalcogenide fuse is formed on top of the resistor. The pressure regulating arrangement comprises a passage for reactor effluent with an inlet connected to the reactor outlet and an outlet for discharging reactor effluent at a reduced pressure with respect to the reactor pressure. There are provided means for bonding two substrates and then irradiating radioactive rays from both sides of the substrates when carrying out radiation curing, and a mechanism for shifting the irradiation starts of both radioactive rays to control an amount of warpage of each substrate after the curing. The polymer nano-strings can include a poly core, and a surface layer comprising poly.